1) For a lots of wafer product

    2) For a treatment of toxic materials such as MAE

  1) Easy input & output with robot

  2) Easy operation on the touch screen

  3) Automatic control system

  4) Real time condition display of each process

  5) Auto chemical supply system from C.C.S.S

  6) A lots of process recipes

  7) Various QDR mode application

  8) Interlock function in case of emergency

  9) Warning or shutdown function in case of

      unsuitableness

  10) Alarm system under abnormal condition on the process

  11) Spiking system according to chemical level

  12) Door interlock function application

  13) Emergency stop switch installation