1) For chemical supply of auto wet station

  2) For chemical supply of photo mask cleaner

  3) For chemical supply of tube cleaner

  4) For toxic chemical supply such as MAE

  5) For dangerious chemical such as HF, HNO3, H2SO4, HCL, CH3COOH, Al-etchant,Cr-etchant, ITO

  1) Supplied chemical safely from C.C.S.S to Wet station

  2) Controlled chemical quantity automatically

  3) Alarm and shutdown function in case of emergency

  4) Stand-by signal according to customer's request 

  5) Supply signal according to customer's request

  6) Ready signal according to necessary

  7) Emergency signal according to necessary